6-butyl-1,3-dioxo-1H-benzo[de]isoquinolin-2(3H)-yl trifluoromethanesulfonate CAS 1610827-31-0
Identification
CAS Number
1610827-31-0
Name
6-butyl-1,3-dioxo-1H-benzo[de]isoquinolin-2(3H)-yl trifluoromethanesulfonate
Synonyms
1H-Benz[de]isoquinoline-1,3(2H)-dione, 6-butyl-2-[[(trifluoromethyl)sulfonyl]oxy]-
[Index name – generated by ACD/Name]
6-Butyl-2-{[(trifluormethyl)sulfonyl]oxy}-1H-benzo[de]isochinolin-1,3(2H)-dion
[German]
[IUPAC name – generated by ACD/Name]
6-Butyl-2-{[(trifluorométhyl)sulfonyl]oxy}-1H-benzo[de]isoquinoléine-1,3(2H)-dione
[French]
[IUPAC name – generated by ACD/Name]
6-Butyl-2-{[(trifluoromethyl)sulfonyl]oxy}-1H-benzo[de]isoquinoline-1,3(2H)-dione
[IUPAC name – generated by ACD/Name]
SMILES
CCCCc1ccc2c3c(cccc13)C(=O)N(OS(=O)(=O)C(F)(F)F)C2=O
StdInChI
InChI=1S/C17H14F3NO5S/c1-2-3-5-10-8-9-13-14-11(10)6-4-7-12(14)15(22)21(16(13)23)26-27(24,25)17(18,19)20/h4,6-9H,2-3,5H2,1H3
StdInChIKey
MCGHKIFMSZAFAV-UHFFFAOYSA-N
Molecular Formula
C17H14F3NO5S
Molecular Weight
401.355
Properties
Appearance
White to off-white powder
Safety Data
RIDADR
NONH for all modes of transport
WGK Germany
3
Specifications and Other Information of Our 6-butyl-1,3-dioxo-1H-benzo[de]isoquinolin-2(3H)-yl trifluoromethanesulfonate CAS 1610827-31-0
Identification Methods
HNMR, HPLC
Purity
99%min, 99.5% min
Total metal impurities
<100ppb, <50ppb
Shelf Life
2 years
Storage
Under room temperature away from light
Known Application
- Photoacid Generator (PAG) in Semiconductor Lithography
The primary use of CAS 85342-62-7 is as a non-ionic photoacid generator (PAG) used in chemically amplified photoresists. Upon exposure to UV, DUV, or electron-beam radiation, it generates a strong acid that drives resist chemical reactions needed for pattern formation. - Advanced Photoresist Systems
It is widely used in:
KrF (248 nm) photoresists
ArF (193 nm) photoresists
EUV resist research formulations
High-resolution semiconductor lithography materials
Its strong acid generation efficiency makes it suitable for fine pattern transfer in integrated circuit manufacturing. - Microelectronics & Nanofabrication
Used in:
Integrated circuit (IC) fabrication
MEMS manufacturing
Nano-patterning processes
Advanced electronic material development
These applications rely on controlled acid generation and diffusion during exposure and post-exposure bake steps. - UV / Radiation-Induced Polymer Chemistry
Also used as a cationic photoinitiator, enabling:
Cationic polymerization reactions
UV-curable coatings and resins (in research/advanced formulations)
Polymer surface modification systems
Links
This product is developed by our R&D company Watson International Ltd (https://www.watson-int.com/).

![Structure of 6-butyl-1,3-dioxo-1H-benzo[de]isoquinolin-2(3H)-yl trifluoromethanesulfonate CAS 1610827-31-0](https://www.watsonchem.com/wp-content/uploads/2026/07/Structure-of-6-butyl-13-dioxo-1H-benzodeisoquinolin-23H-yl-trifluoromethanesulfonate-CAS-1610827-31-0-845x321.jpg)











